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Analysis of the technological parameters influence on the reproducibility of the active dielectrics properties
| Theme: | ||
| Author: | Pecherskaya Ekaterina , Печерский Анатолий Вадимович , Головяшкин Алексей Николаевич , Головяшкин Алексей Алексеевич , Голубков Павел Евгеньевич , Шепелева Юлия Васильевна | |
| Annotation: | https://ieeexplore.ieee.org/document/8435090 | |
| Type: | Article | |
| Kind: | Electronic copy | |
| Parts: | 1 | |
| The year of publishing: | 2018 | |
| Publishing house: | Institute of Electrical and Electronics Engineers Inc | |
| Publishing place: | International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM | |
| The target audience: | Researcher | |
| Special purpose: | Scientific | |
| Copyright holder: | Печерская Е.А. | |
| DOI: | 10.1109/EDM.2018.8435090 | |
| Url: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85052365604&origin=inward | |
| Language: | English | |
| Post date: | 13.11.2018 |