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Technological Aspects of Formation of the Primary Measuring Transducers for the Micromechanical Accelerometers
| Theme: | ||
| Author: | Торгашин Сергей Иванович , Папко Антонина Алексеевна , Пауткин Валерий Евгеньевич , Цыпин Борис Вульфович | |
| Type: | Article | |
| Kind: | Electronic copy | |
| Parts: | 1 | |
| The year of publishing: | 2019 | |
| Publishing house: | Издательство "Новые технологии" | |
| The target audience: | Researcher, Industry | |
| Special purpose: | Scientific, Industrial | |
| Copyright holder: | АО "НИИФИ" | |
| ISSN: | 1813-8586 | |
| DOI: | DOI:10.17587/nmst.21.341-346 | |
| Bibliographic reference: | Torgashin, S.I.; Papko, A.A.; Pautkin, V.E.; Tsypin, B.V. Technological Aspects of Formation of the Primary Measuring Transducers for the Micromechanical Accelerometers / NANO- and MICROSYSTEMS TECHOLOGY, 2019, Issue N6, Т. 21, pp. 341-346. | |
| Pages: | с 341 по 346 | |
| Vol: | 21 | |
| Url: | http://apps.webofknowledge.com/full_record.do?product=UA&search_mode=GeneralSearch&qid=1&SID=C2eUsrvP28wg9oOnY6m&page=1&doc=1 | |
| Language: | English | |
| Post date: | 18.12.2019 |