Creating Lithographic Pictures Using Faceted Zinc Oxide Microparticles on a Silicon Substrate

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Author: Пронин Игорь Александрович , Якушова Надежда Дмитриевна , Карманов Андрей Андреевич , Аверин Игорь Александрович 
Type: Article
Kind: Electronic copy
Parts: 1
The year of publishing: 2018
Publishing house: Springer
Publishing place: Technical Physics Letters
The target audience: Researcher
Special purpose: Scientific
Copyright holder: Springer
DOI: 10.1134/S1063785018080047
Url: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85052796212&origin=inward
Language: English
Post date:17.11.2018